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Wafer Storage Desiccator Cabinets

Wafer Desiccator Cabinets

Cleatech® Wafer storage cabinets or wafer box desiccators are designed for optimal storage density of 150mm,  200mm or 300mm silicon wafers and provide electrostatic safe , humidity controlled, particle free (ISO5 and ISO6 standard) environment.

A  wafer,(also known as substrate) is a thin slice of semiconductor material,  used in electronics for the fabrication of integrated circuits that  power many of electronic devices uses everyday.

Semiconductor wafers should be stored in relative humidity of less than 30%, and in clean, ESD safe, dry, inert atmosphere. If they are not vacuum sealed should be placed in a Nitrogen purge cabinet with a flow rate of 2 to 5 SCFH.

Prices include Stainless steel door frame.

Click on the product codes of wafer desiccators to see the datasheet or request a quote 

Overall Size
W” x D” x H”
Wafer
Size
No. Of
Chambers
Storage
Capacity
Chamber
Clearance
W” x D” x H”
Clear Acrylic 
  Static-Dissipative ESD  PVC
 
26 1/2x25x48
200mm
4
16*
25x23x10 13/16
$2,630
$4,390
26 1/2x25x60
200mm
5
20*
25x23x10 13/16
$3,100
$4,980
53x25x36
200mm
6
24*
25x23x10 13/16
$3,920
$6,430
53x25x48
200mm
8
32*
25x23x10 13/16
$4,780
$7,900
53x25x60
200mm
10
40*
25x23x10 13/16
$6,060
$9,940
19x25x64
300mm
4
8**
17 7/16x23x14 1/2
$2,950
$4,630
19x29x64
300mm
4
8
17 7/16x27x14 1/2
$3,460
$5,410
38x25x64
300mm
8
    16**
17 7/16x23x14 1/2
$4,670
$7,200
38x29x64
300mm
8
16
17 7/16x27x14 1/2
$5,140
$7,930

* Based on Wafer Containers 12″W x 11″D x 10 1/4″ H or smaller

** Based on Wafer Containers 17″W x 101/2“D x 14” H or smaller

Note: The  wafer desiccators with 29″ Depth can be used for 300mm wafer carriers / FOSB, two boxes per chamber as large as 17″W x 13

Option  CodeDescriptionPrice
A21-HM-HDDOne-Channel Nitrogen-Purge Control Unit with one humidity sensor installed in lower chamber *$1,520
A21-GP-FM20Flowmeter, range 2-20 SCFH air. with Valve-External Mount$130
A21-GP-IN/BVGas-in Port & Pressure Relief Valve **$90

 

Option  CodeDescriptionPrice
A15-ST-P08WxStand with Caster- Powder Coated Steel- Single Column$400
A15-ST-P08WxStand with leveling mount- Powder Coated Steel- Single Column$360
A15-ST-P08WxStand with Caster- Powder Coated Steel- Double Columns$650+
A15-ST-P08WxStand with leveling mount- Powder Coated Steel- Double Columns$610+

*       No Flowmeter is required if choosing Nitrogen Purge Control unit
**    Gas-in port and pressure relief valve are required for Nitrogen purge desiccators

Standard Options

• 1/4″ thickness Clear/Amber Acrylic, Static-Dissipative PVC

• Stainless Steel door hinge for maximum door support

• Lift-and-turn Compression Latch

• One-piece door sealing

• Plenum chamber minimizes back-fill ensures uniform gas distribution

• 304 stainless steel door frame extend service lifetime and improve sealing performance

• Stainless steel racks allow shelf placement at one-inch increments.

• Grounded rack , hinge and door latch provide additional ESD safety for S.D. PVC desiccators

Standard Options

• Heavy-duty Powder coated steel stand

• Lockable casters for large capacity desiccator cabinets enhanced mobility

• Gas-in Port and Adjustable Auto pressure relief valve relives excess nitrogen (N2)

• An Automatic nitrogen purge control unit provides automatic low-humidity control capable of measuring and displaying humidity inside the Desiccator cabinet in the range: 5-100%RH, Accurately Controls Pre-Set Relative Humidity (+/- 2% RH)

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